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Here is a list of articles describing some aspect of the semiconductor manufacturing process. This is not a frequent subject to locate, so if you want to suggest an article for me to include, please email me.

"The Near Impossibility of Making a Microchip," Daniel P. Burbank: American Heritage of Invention and Technology, Fall 1999, Volume 15/Number 2, pages 44-52. This article talks about the progress of the chip-making equipment and its impact on better and cheaper semiconductor products. Not too technical, good reading.
"Making the Chips that Run the World," Jake Page: Smithsonian Magazine, January 2000, Volume 30, Number 10, pages 37-46. The author takes us on a trip inside a FAB describing the look and feel of wearing a "bunny suite." Nice description of silicon, the tools and the Fab itself.